MikroMasch HQ Line Test Structures: TGF11 Calibration Series thumb
MikroMasch HQ Line Test Structures: TGF11 Calibration Series thumb
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NanoAndMore/TGF11 Calibration Standard - NanoAndMore/TGF11/NM
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产品说明
TGF11Grating with Trapezoid Structures for Lateral Force Calibration and Scanner Nonlinearity AssessmentProduct DescriptionThe TGF calibration gratings feature one-dimensional arrays of trapezoidal steps etched into a silicon substrate. The sidewalls of the structures are very smooth and planar surfaces with well-defined orientation formed by the (111) crystallographic planes in monocrystalline silicon. The sidewalls and the horizontal top surfaces form a well defined angle.array pitch 10 µm, accuracy 0.1 µmedge angle 54.74°3 x 3 mmstep height ~ 1 µm (approximate value, not for vertical calibration purposes)chip dimensions 5 x 5 x 0.3 mmApplicationTGF11 grating can be used for the assessment of scanner nonlinearity in the vertical direction. Direct calibration of the lateral force can be obtained by analyzing the contact response measured on the flat and sloped facets. This can be done for the calibration of conventional Si probes or cantilevers with an attached colloidal particle with any radius of curvature up to 2 μm.

AFM 探针规格范围

在 NanoAndMore 投资组合中

  • 1原子力显微镜提示

    • 曲率半径: 1 - 20000 纳米

    • 高度: 2 - 50 微米

  • 2 AFM 悬臂

    • 共振频率: 6 - 5000 kHz

    • 力常数: 0.01 - 2000 牛/米

    • 长度: 7 - 500 微米

    • 宽度: 0.8 - 120 微米

    • 厚度: 0.08 - 7 µm

  • 3支撑芯片(搬运)

    • 方面: 1.6 毫米 x 3.4 毫米

* 上述属性范围以及 AFM 探针指南包括 NANOSENSORS™ 特殊开发列表 AFM 探针,这些 AFM 探针可能未列在 NanoAndMore 上的常规 AFM 探针范围内。如果您无法通过搜索字段找到您正在寻找的 AFM 探针,请与我们联系 - 我们将很乐意为您提供帮助!